| 摘要 |
PROBLEM TO BE SOLVED: To provide a system having improved throughput by reducing the time for waiting the stabilization of a sample size caused by cooling of atmosphere gas, due to adiabatic expansion in a load lock chamber. SOLUTION: The temperature of a treatment chamber is set lower than the ambient temperature of charged particle beams, corresponding to the sample temperature to be carried. As a result, treatment can be started, immediately after carrying the sample into the treatment chamber, and thereby throughput is improved. |
