| 摘要 |
PROBLEM TO BE SOLVED: To provide an alicyclic dissolution inhibiting compound which is at a low cost and has a fast hydrolysis velocity, a high ability as a dissolution inhibitor and a good dry etching durability. SOLUTION: This invention relates to an alicyclic diether derivative represented by formula [1]. Also this invention relates to a method for producing an alicyclic diether represented by formula [1] which is characterized by reacting alicyclic dimethanol represented by formula [2] with a 4-10C (substituted) cyclic hydrocarbon which may have oxygen atom (for example 3,4-dihydro-2H-pyran) [wherein, Q is a 10-22C alicyclic hydrocarbon group which may have a double bond; X is -CH2 O or -O-; R is a 4-10C (substituted) cyclic hydrocarbon which may have oxygen atom. But two (-X-R) substituents are adjacent to each other].
|
