MICROFLUIDIC VALVE AND MICROACTUATOR FOR A MICROVALVE

摘要

A microactuator device (12) includes a base (20) with at least one electrode pad (24) and a permeation membrane (18). Permeation membrane (18) is typical ly a water-permeable membrane that is able to deform by applying an electric charge to the electrode pad (24). The actuator device (12) can be incorporat ed into valve assembly (10) to open and close the valve. The valve assembly can have a reciprocating valve member (146) operated by the deforming of the wat er- permeable member. Alternatively, the valve assembly can have an opening (46) positioned to cooperate with the water-permeable membrane (18) so that the deformation of the membrane closes the opening.