| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional surface shape measuring device and a three- dimensional surface shape measuring method, capable of conducting surface shape measurement, with a scanning speed and a measurement accuracy suitable for the surface shape of a measuring object. SOLUTION: In this three-dimensional surface shape measurement, a measurement point displacement meter for detecting the distance from a measurement point on the surface of the measuring object and the measuring object are relatively moved, to thereby scan relatively the surface of the measuring object, and the change of the distance from the measurement point on a scanning locus is detected by the measurement point displacement meter, to thereby measure the surface shape of the measuring object. The measurement is characterized, by executing primary setting of the scanning speed for the relative scanning, conducting measurement at an n-th measurement point which is a measurement point in the arbitrary n-th order (n is an integer, 1<=1n<=N) among measurement points to the number of N (N is an integer not less than two) determined beforehand, before the start of the measurement, and adjusting the scanning speed for measurement at the next measuring point, based on the measurement result at the n-th measuring point.
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