发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a stable photosensitive resin composition capable of retaining the tack-freeness of a photosensitive resin dry film in warming by the effects of remaining heat after drying, a temperature rise due to exposure, etc., capable of undergoing contact exposure through a mask pattern and having high sensitivity, high adhesion and high resolution. SOLUTION: The photosensitive resin composition consists essentially of (A) a modified copolymer resin having a terminal ethylenically unsaturated group and a carboxyl group in a side chain and obtained by reacting a copolymer resin having carboxyl groups with an alicyclic epoxy-containing unsaturated compound, (B) a photopolymerizable compound having at least one polymerizable ethylenically unsaturated group in one molecule and (C) a photopolymerization initiator.
申请公布号 JP2002251007(A) 申请公布日期 2002.09.06
申请号 JP20010048016 申请日期 2001.02.23
申请人 TOPPAN PRINTING CO LTD 发明人 ARAI KAZUNARI;OBARA MIDORI;NAGASAKI YOSHINORI;OE YASUSHI
分类号 G03F7/027;C08F2/50;C08F8/00;C08F290/12;G03F7/028;G03F7/038;H01L21/027 主分类号 G03F7/027
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