| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion sensor in which the size can be reduced while prolonging the lifetime. SOLUTION: The ion sensor comprises a silicon substrate 1 having an ISFET 10 responsive to a specified ion formed on the major surface side, a liquid communicating part 38 formed at a thin part 1b which is formed by opening a recess 1a in the rear surface of the silicon substrate 1 and provided with a large number of fine pores 38a for touching an electrolyte 31 filling the recess 1a to a measuring solution on the major surface side of the silicon substrate 1, a support 15 boded to the silicon substrate 1 to choke the recess 1a, and a reference electrode 34 of silver - silver chloride touching the electrolyte 31. A liquid storing part 17 communicating with the recess 1a opening to the rear surface of the silicon substrate 1 and storing the electrolyte 31 is provided in the support 15 and the liquid storing section 17 made across the recess 1a and the support 15 is filled with the electrolyte 31. |
