| 摘要 |
PROBLEM TO BE SOLVED: To defect-inspect a flat display panel, using a line sensor of high resolution to verify a degree of the defect in detail and precisely, and to efficiently conduct measurement to shorten the inspection time. SOLUTION: In this defect inspecting device for the flat display panel 1 for inspecting optically the presence of the defect in the flat display panel 1 based on a sensor data D0 obtained, by moving the display panel 1 and the line sensor 12 relative to scan plural pixels R, G, B of the display panel 1 by plural photoreceptive elements 12a of the line sensor 12, measured values provided by the line sensor 12 are average-processed to find an averaged image data D2 , and the presence of the defects in the display panel 1 is determined based on the averaged image data D2 . |
