Abschirmvorrichtung für integrierte Schaltungen

摘要

The invention relates to a screening device comprising means for optical and/or electrical screening which are arranged in the semiconductor chip on the side of the integrated circuit facing the substrate. Preferred embodiments use an SOI substrate with the integrated circuit in the body silicon layer (3) and with the isolator layer (2) as an optical screening device of the bulk silicon layer (1). Electrical conductors (5) can be provided in the bulk silicon layer as an optical and electrical screening device and can be connected to the circuit by means of platings (4).