Optical waveguide circuit

摘要

An optical waveguide circuit is provided that can reduce or eliminate polarization dependence by reducing or eliminating birefringence. A substrate consists of a silicon substrate, and a cladding and a core are composed of silica-based glass. The core has a multilayer structure composed of a few types of layers with different refractive indices such as first core layers and second core layers stacked in the direction parallel to the substrate. As for the birefringence of the waveguide, the geometrical birefringence caused by the multilayer structure is canceled out by the other birefringence, thereby being able to reduce or eliminate the birefringence of the waveguide.