DEVICE FOR MEASURING PRESSURE OF FLUID, METHOD USING THE SAME AND FACILITIES MANUFACTURING SEMICONDUCTOR PRODUCT APPLYING THE SAME

摘要

PURPOSE: A device for measuring pressure of fluid, method using the same and facilities manufacturing semiconductor product applying the same are provided to accurately estimate time for replacing parts and to prevent inferior process due to loss of fluid pressure. CONSTITUTION: A device includes a measuring module body(310) drawing fluid having first pressure and second pressure from a front end and a rear end of a member inducing fluctuation of pressure of streaming fluid, respectively, and joining the fluid on a fixed location in directions facing each other; a measuring piece(330) installed between the joining fluid and generating physical displacement due to difference between the first pressure and the second pressure of the fluid; and a detector(400) generating electric signal corresponding with the difference between the first pressure and the second pressure in response to the physical displacement generated in the measuring piece.