| 摘要 |
PROBLEM TO BE SOLVED: To easily position units to be connected by utilizing a laser beam. SOLUTION: The vacuum equipment having a first vacuum chamber unit 10 and a second vacuum chamber unit 20 to be connected to line up side by side is arranged with a laser beam transmitter 30 and a light receiving member 40 at both ends of an optical path extending to both units 10 and 20. Position adjusting means 23 is added to either one or both of both units and the unit positions are adjusted by the position adjusting means in accordance with the light receiving state of the laser beam.
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