发明名称 Semiconductor element testing carrier using a membrane contactor and a semiconductor element testing method and apparatus using such a carrier
摘要 A semiconductor element testing carrier prevents a semiconductor element from being displaced relative to a membrane contactor during a testing operation and an attaching operation of the semiconductor element to a semiconductor element testing carrier. The semiconductor element testing carrier holds a semiconductor element to be tested so as to obtain an electrical contact with electrodes of the semiconductor element, the semiconductor element having a first surface on which the electrodes are formed and a second surface opposite to the first surface. A membrane contactor has a front surface and a back surface opposite to the front surface. The membrane contactor contacts the electrodes of the semiconductor element being placed on the front surface of the membrane contactor. A pressing unit presses the membrane contactor toward the semiconductor element from a side of the back surface of membrane contactor. A pressing and holding member holds the second surface of the semiconductor element. A contacting part is protrudingly formed on one of the pressing and holding member and the membrane contactor so that the semiconductor element is held between the membrane contactor and the pressing and holding member while the membrane contactor contacts the pressing and holding member via the contacting part.
申请公布号 US6445200(B2) 申请公布日期 2002.09.03
申请号 US19980190028 申请日期 1998.11.12
申请人 FUJITSU LIMITED 发明人 HASEYAMA MAKOTO
分类号 G01R31/26;G01R1/04;H01L21/66;(IPC1-7):G01R31/02 主分类号 G01R31/26
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