| 摘要 |
A method for manufacturing a driving module of an ink jet apparatus. The driving module is manufactured by the steps of: forming a working fluid chamber etching a wafer, vapor-depositing a low electrode in the working fluid chamber, attaching a polyamide sheet on the wafer, forming a membrane etching of the polyamide sheet, and vapor-depositing an upper electrode on the membrane. The working fluid chamber is formed by a wet etching process, while the membrane is formed by a dry etching process. Since the membrane is manufactured together with the driving module, no additional processes for separately making the membrane are required, and accordingly, a process for attaching the membrane is not required. Further, there is no waste of wafers and other materials for making the membrane, and the membrane is made to be appropriately thin, thus the ink jet apparatus is driven efficiently even with low potential difference.
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