发明名称 PIEZOELECTRIC ELEMENT AND ACOUSTIC/ELECTRIC CONVERTER AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a thin piezoelectric element whose thickness is hardly realized by the conventional manufacturing technique and a method for manufacturing this piezoelectric element, and to provide a method for manufacturing an optical lens. SOLUTION: A first oscillating part is formed, and then a second groove part (a second oscillating part) is formed at the outer periphery of the first oscillating part, and the chemical etching working of the first oscillating part and the second groove part (second oscillating part) is relatively carried out so that a stepped oscillator having two steps or more can be formed by this method of working a piezoelectric element.</p>
申请公布号 JP2002246872(A) 申请公布日期 2002.08.30
申请号 JP20010091394 申请日期 2001.02.19
申请人 NAGAURA YOSHIAKI;NAGAURA KUMIKO;NAGAURA ZENICHIRO 发明人 NAGAURA YOSHIAKI
分类号 H01L41/09;H01L41/22;H01L41/332;H01L41/337;H03H3/02;H03H9/19 主分类号 H01L41/09
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