摘要 |
PROBLEM TO BE SOLVED: To easily form silicon single crystal fine particles while separation/ contact with electron cloud is easily controlled. SOLUTION: Silicon single crystal fine particles 14-17 are almost constantly spaced on a silicon oxide film 12. A top of each of the silicon single crystal fine particles 14-17 is connected to a polycrystal silicon film 18. Phosphorus atoms (donor atoms) 31-34 are put in the silicon single crystal fine particles 14-17, respectively. Metal electrodes 20-23 are formed on the silicon single crystal fine particles 14-17, respectively, with metal electrodes 24-27 formed among them. Although the silicon single crystal fine particles 14-17 do not directly contact each other, electric potentials applied to the metal electrodes 20-27 allow exchange of atomic nucleus spin among a plurality of phosphorus atoms 31-34 with an electron as a medium. |