| 发明名称 |
Installation for fabricating semiconductor products |
| 摘要 |
An installation for fabricating semiconductor products includes a transport system for supplying the semiconductor products to fabrication units in a clean room. A portal crane installation includes at least one transport container which is guided above the fabrication units and which can be lowered to the fabrication units.
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| 申请公布号 |
US2002119036(A1) |
申请公布日期 |
2002.08.29 |
| 申请号 |
US20010014246 |
申请日期 |
2001.11.07 |
| 申请人 |
HUBER RONALD;KLABSCH ROLF-ARNO |
发明人 |
HUBER RONALD;KLABSCH ROLF-ARNO |
| 分类号 |
B65G49/00;B65G49/07;B66C13/00;B66C13/48;B66C17/04;H01L21/02;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/00 |
| 代理机构 |
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代理人 |
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