| 摘要 |
A placement robot having a given positional resolution accuracy positions a component for placement at a selected location on a target substrate. A micro alignment pick-up head (MAP) (20) holds the component. The MAP includes a retention member that may be a vacuum pick-up nozzle (36) and has two main parts: an upper body (22) and a lower body (24). Separated from one another by an air bearing (26). A pressurized gas line to the MAP provides pressurized air to the air bearing. The nozzle (36) with the component attached therefore has a range of motion within the air bearing which exceeds the positional resolution accuracy of the basic placement robot. The MAP may be in one of two states. In the first state the air bearing (26) is disabled, as by inverting the pressure on the air bearing to vacuum, and the upper body and lower body are therefore locked together and move as one. In the second state the air bearing is active and the pick-up head nozzle may be moved freely with no appreciable friction. Micropositioning actuators (58) may be coupled to the MAP's upper body to contact the lower body so as to provide fine positioning in the X and/or Y directions. |
