| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an X-ray analyzer, capable of accurately comparing the sensitivities of the electronic spectroscopes of respective apparatuses. SOLUTION: The temperature of a measuring element 14 is raised due to the incidence of Alkαrays and scattered X-rays or the like impinge against measuring elements 14 and 16 to raise the temperatures of the measuring elements 14 and 16 in the same way. Since thermocouples 18 and 19 are connected differentially so as to detect the difference between the temperatures of the measuring elements 14 and 16, the voltage value, measured by a voltage measuring part 25, is changed by the temperature rise of the measuring element 14 due to only the absorption of Al kαrays. A control unit 26 calculates the X-ray intensity x0 of Al kαrays on the basis of the voltage signal from the voltage measuring part 25. Thereafter, the standard sample of the sample holder attached to a sample receiving stand 11 is irradiated with Al kαrays and the control unit 26 obtains the sensitivity of the electronic spectroscope, on the basis of the output signal intensity of the detector 32 and the X-ray intensity x0.</p> |
