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发明名称
CHEMICAL FLUID DEPOSITION FOR THE FORMATION OF METAL AND METAL ALLOY FILMS ON PATTERNED AND UNPATTERNED SUBSTRATES
摘要
申请公布号
EP1234063(A2)
申请公布日期
2002.08.28
申请号
EP20000976857
申请日期
2000.11.02
申请人
UNIVERSITY OF MASSACHUSETTS
发明人
WATKINS, JAMES J.;BLACKBURN, JAMES M.;LONG, DAVID P.;LAZORCIK, JASON L.
分类号
C23C18/16;C23C18/00;C25D5/34;C25D7/12;H01L21/208;H01L21/288;H01L21/316;H01L21/368;H01L21/768;(IPC1-7):C23C18/00
主分类号
C23C18/16
代理机构
代理人
主权项
地址
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