| 摘要 |
PURPOSE: A movable-body apparatus, an optical deflector and a fabricating method thereof are provided to reduce a manufacturing cost and a size and to improve an operational speed. CONSTITUTION: Portions of the second support substrate on opposite sides of the twisting longitudinal axis of the torsion springs(6) are provided with two C-shaped stationary cores(10A,10B) and coils(9A,9B) wound thereon for generating magnetic fluxes flowing along directions parallel to the second support substrate, respectively. The coils(9A,9B) are connected to current sources, respectively, and the motion of the movable plate(5) is controlled by these current sources. The C-shaped stationary cores(10A,10B) and the coils(9A,9B) are also integrally formed on the substrate by micromachining techniques.
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