发明名称 |
CONTACT PROBE AND ITS MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To prevent contact pins from bending or twisting even if they are long projections. SOLUTION: A buffer agent 26 made of a photoresist is packed between adjoining contact pins 21a projecting from an end part 20a of a film 22. A photoresist layer used as a pattern for forming pattern wiring is partly masked and laser is applied to the photoresist layer positioned in gaps between contact pins 21a, thereby forming the buffer agent 26 made of the photoresist packed between adjoining contact pins 21a.
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申请公布号 |
JP2002243762(A) |
申请公布日期 |
2002.08.28 |
申请号 |
JP20010038529 |
申请日期 |
2001.02.15 |
申请人 |
MITSUBISHI MATERIALS CORP |
发明人 |
KAWAKAMI YOSHIAKI;ISHII TOSHINORI;KATO NAOKI;FUJIMORI SHUJI |
分类号 |
G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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