摘要 |
A method of detecting a deviation in a servo control system to control a controlled system, has the processes of: applying a disturbance signal, which has a wave form having a constant frequency, to the controlled system; detecting a variation in a wave form of an output signal output from the controlled system by comparing the wave form of the output signal with the wave form of the disturbance signal; and detecting the deviation on the basis of the detected variation.
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