NON-CONTACT SEAL USING PURGE GAS,申请号KR1020027000041-传众专利搜索

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发明名称	NON-CONTACT SEAL USING PURGE GAS
摘要
申请公布号	KR20020068492(A)	申请公布日期	2002.08.27
申请号	KR1020027000041	申请日期	2002.01.03
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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