FORK ARM FOR WAFER TRANSFERRING APPARATUS

摘要

PURPOSE: A fork arm for a wafer transferring apparatus is provided to prevent scratch and contamination of the fork arm caused by a frequent contact with a wafer, by reducing a contact area with the wafer so that a direct contact with the wafer is minimized. CONSTITUTION: The fork arm(20) is composed of a circular arc of which the end portion has a predetermined radius of curvature. The radius of curvature of the fork arm is expanded to increase the breadth of a wafer settling unit. A penetration part is formed in the almost center of the wafer settling part to reduce a real contact area with the wafer(W).