发明名称 SURFACE STRUCTURE OF SUBSTRATE OF PEROVSKITE TYPE OXIDE FILM, THE SUBSTRATE AND THE PEROVSKITE TYPE OXIDE FILM
摘要 PROBLEM TO BE SOLVED: To provide a surface structure of a substrate having excellent adhesion to a perovskite type oxide film which is formed on the surface of the substrate, and to provide the substrate and the perovskite type oxide film. SOLUTION: In the substrate on whose surface the perovskite type metal oxide is formed, an electrode layer contacting with the perovskite type metal oxide, an adhesion layer contacting with the surface oxide layer of the substrate and an alumina layer interposed between the adhesion layer and the electrode layer are provided.
申请公布号 JP2002234709(A) 申请公布日期 2002.08.23
申请号 JP20010029988 申请日期 2001.02.06
申请人 MITSUBISHI MATERIALS CORP 发明人 MAKI KAZUMASA;SOYAMA NOBUYUKI;FUJITA SATOSHI
分类号 C04B35/46;C01B13/14;C01B13/32;C01G25/00;H01L21/316;H01L21/8246;H01L27/105;H01L41/08 主分类号 C04B35/46
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