| 摘要 |
PURPOSE: A member coated with diamond is to provide a corrosion resistant member coated with diamond in a reaction chamber in which a substrate typified by a silicon wafer is exposed to plasma, a corrosive gas or the like such that the corrosion resistant member exhibits excellent corrosion resistance and is used as a member, e.g. a ring, a chamber lining, a shower plate for gas, a nozzle, a susceptor, an electrostatic chuck or a heater. CONSTITUTION: A substrate is formed from aluminum nitride or the like. A diamond thin film covers at least a part of the surface of the substrate and closely adheres to the surface of the substrate. The adhesion strength between the thin film and the substrate is not less than 15 Mega Pascal. The orientation degree of the 220 plane of the diamond crystal structure present in the plane parallel to the substrate is expressed by following formula. £Im220/(Im220+Im111)|/£Ip220/(Ip220+Ip111)| is less than 1.
|
