| 摘要 |
PROBLEM TO BE SOLVED: To provide a circulation air cooling system for a light irradiation apparatus being used in a clean room but fundamentally consuming no clean air though it is used in the clean room. SOLUTION: A circulation cooling system for a light irradiation apparatus is an air cooling system for a light irradiation apparatus situated in a clean room. The system comprises an exhaust blower to exhaust cooling air from the light irradiation apparatus, and a cooler in a position situated downstream from the light source lamp. After cooling air passing through the light source lamp and increased to a high temperature is cooled by the cooler, it is circulated and fed to the light source lamp. Further, an exhaust port or an external exhaust means or an internal exhaust means is situated between the exhaust blower and the light irradiation apparatus, and the internal pressure of the light irradiation apparatus is prevented from being increased to a value higher than a pressure in the clean room. |
