发明名称 |
Non-contacting conveyance equipment |
摘要 |
<p>The invention relates to non-contacting conveyance equipment characterised in that it comprises a holding means comprising a body having a surface against which an object is held without contacting the surface, the surface having a recess therein, and the body having a fluid passage to supply a fluid to the recess such that the fluid circulates about the inner circumference of the recess. <IMAGE></p> |
申请公布号 |
EP1233442(A2) |
申请公布日期 |
2002.08.21 |
申请号 |
EP20010306016 |
申请日期 |
2001.07.12 |
申请人 |
HARMOTEC CORPORATION |
发明人 |
IWASAKA, HITOSHI;TOKUNAGA, HIDEYUKI |
分类号 |
H01L21/677;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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