发明名称 Membrane probing system with local contact scrub
摘要 A membrane probing assembly includes a support element having an incompressible forward support tiltably coupled to a rewarward base and a membrane assembly, formed of polyimide layers, with its central region interconnected to the support by an elastomeric layer. Flexible traces form data/signal lines to contacts on the central region. Each contact comprises a rigid beam and a bump located in off-centered location on the beam, which bump includes a contacting portion. After initial touchdown of these contacting portions, further over-travel of the pads causes each beam to independently tilt locally so that different portions of each beam move different distances relative to the support thus driving each contact into lateral scrubbing movement across the pad thereby clearing away oxide buildup. The elastomeric member backed by the incompressible support ensures sufficient scrub pressure and reliable tilt recovery of each contact without mechanical straining of the beam. In an alternative embodiment, the contacts comprise conductive beams each supported on a loose U-shaped flap formed in the membrane assembly where each flap and beam is tiltably supported in inclined position by an elastomeric hub interposed between the flap and support.
申请公布号 US6437584(B1) 申请公布日期 2002.08.20
申请号 US20000686353 申请日期 2000.10.10
申请人 CASCADE MICROTECH, INC. 发明人 GLEASON K. REED;SMITH KENNETH R.;BAYNE MIKE
分类号 G01R31/26;G01R1/06;G01R1/067;G01R1/073;G01R31/02;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 主分类号 G01R31/26
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