发明名称 Microstructures
摘要 A method for making a microstructure assembly, the method including the steps of providing a first substrate and a second substrate; depositing an electrically conductive material on the second substrate; contacting the second substrate carrying the electrically conductive material with the first substrate; and then supplying current to the electrically conductive material to locally elevate the temperature of said electrically conductive material and cause formation of a bond between the first substrate and the second substrate.
申请公布号 US6436853(B2) 申请公布日期 2002.08.20
申请号 US20010794455 申请日期 2001.02.27
申请人 UNIVERSITY OF MICHIGAN 发明人 LIN LIWEI;CHENG YU-TING;NAJAFI KHALIL;WISE KENSALL D.
分类号 B81B7/00;H03H3/007;H03H9/10;(IPC1-7):H01L21/00;H01L23/20 主分类号 B81B7/00
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