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发明名称
CSP PLATE HOLDER
摘要
申请公布号
SG90748(A1)
申请公布日期
2002.08.20
申请号
SG20000005012
申请日期
2000.09.01
申请人
DISCO CORPORATION
发明人
EIICHI YOSHIMURA;SHINICHI NAMIOKA
分类号
H01L23/12;B28D5/00;H01L21/50;H01L23/28;(IPC1-7):H01L21/68
主分类号
H01L23/12
代理机构
代理人
主权项
地址
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