,申请号JP19940156703-传众专利搜索

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发明名称
摘要
申请公布号	JP3316089(B2)	申请公布日期	2002.08.19
申请号	JP19940156703	申请日期	1994.06.15
申请人		发明人
分类号	G01R31/26;B07C5/36;G01R29/22;G01R31/00;H01L21/66;H03H3/02;H03H9/08;(IPC1-7):G01R31/00	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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