ELECTRODELESS DISCHARGE LAMP DEVICE AND FLUID PROCESSING UNIT

摘要

PROBLEM TO BE SOLVED: To easily provide a large-scale electrodeless discharge lamp device capable of easily and effectively cooling a power source side electric power amplifying circuit. SOLUTION: Electric power supplied from a high frequency power source 4 capable of oscillating a high frequency is amplified by the electric power amplifying circuit 5, and is supplied to an exciting coil 3 via a matching circuit 6, and a high frequency magnetic field is made to act on an electrodeless discharge lamp 2 to generate discharge. In this case, a fan control part 8 cools the electric power amplifying circuit 5 by rotating a cooling fan by supplying an electric current to a fan motor 7 when a temperature of the electric power amplifying circuit 5 detected by a temperature sensor 9 becomes a preset temperature or more (for example, a temperature unreachable in ordinary operation).