摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for polarizing a laminated piezoelectric element capable of making a dielectric polarization distribution of a laminated piezoelectric element uniform and improving a yield. SOLUTION: The method for polarizing the laminated piezoelectric element comprises the steps of alternatively laminating a plurality of piezoelectric layers 1a to 1d and a plurality of internal electrodes 2a to 2c, and polarizing the adjacent piezoelectric layers 1b, 1c reversely to each other in a thickness direction. The method further comprises a primary polarization step of uniformly applying an electric field of one direction in the thickness direction to the piezoelectric element 1 and uniformly polarizing in the thickness direction, and a secondary polarization step of applying an electric field of a reverse direction to piezoelectric layers 1b, 1c of both sides of the electrode 2b, and inverting only the polarization axis of the layer 1b of one side of the electrode 2b. In this case, the secondary polarization is executed at a residual dielectric polarization Pr2 after the secondary polarization at the layer 2b inverted at the polarization axis in a range not exceeding a residual dielectric polarization Pr1 after the primary polarization.</p> |