| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an active matrix liquid crystal display which can lessen the dispersion within itself of the capacitance between the source and gate and between the drain and gate of a thin film transistor. SOLUTION: In the active matrix liquid crystal display which is equipped with the thin film transistor which has a gate electrode, a gate insulating film, a semiconductor film, a source electrode, and a drain electrode on an insulating substrate and in which the contacts between the semiconductor film near the gate electrode and the source electrode and the drain electrode become severally a source region and a drain region, the source electrode and the drain electrode of the thin film transistor are made in a self alignment manner by etching it to the topside of the projection made by the gate electrode in the semiconductor film, making use of the step difference made by the gate electrode of the thin film transistor and the semiconductor film.</p> |
