| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of dirt readhering, since an object to be cleaned is dipped into cleaning liquid, when a cleaning bath is used, and the amount of cleaning liquid 4 is increased in a cleaning device using a nozzle 1. SOLUTION: When the cleaning liquid 4 that is supplied from a cleaning liquid supply section 2 to a cleaning liquid supply port 3 is allowed to flow onto the surface of the object 1 to be cleaned, such as a semiconductor wafer, the cleaning liquid 4 flows onto the entire surface of the object 1 to be cleaned with nearly a uniform thickness. However, when an ultrasonic vibrator 5 is brought into contact with the cleaning liquid 4, and oscillation output is applied to the ultrasonic vibrator 5 from an oscillator 6, ultrasonic waves are applied to the surface of the object 1 to be cleaned from the ultrasonic vibrator 5, the ultrasonic waves are reflected and at the same time, are propagated by the object 1 to be cleaned and the upper surface of the cleaning liquid 4 for propagating over the entire surface of the object 1 to be cleaned that is covered with the cleaning liquid 4.
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