| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for vaporizing and delivering liquid precursor to a processing chamber. SOLUTION: The apparatus is a liquid delivery system including a liquid supply 120, a vaporization assembly 130 which is fluidally coupled to the liquid supply and consists essentially of an ampoule 140 and a mass flow controller 150 connected with he ampoule, and the processing chamber 160 fluidally coupled to the vaporization assembly. The liquid precursor is vaporized in the ampoule. In a preferred embodiment, the ampoule is located adjacent to the processing chamber to provide a point of use vaporization of the liquid precursor. In another mode, the method includes a step for providing the liquid supply containing the liquid precursor, a step for delivering the liquid precursor to the ampoule, a step for vaporizing a portion of the liquid precursor in the ampoule, and a step for flowing the vaporized precursor to the processing chamber.
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