| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for detecting defects capable of detecting only defects with large areas and relatively small changes of density, in the subject of inspection. SOLUTION: The defect detection device for the subject of inspection includes an imaging means 4 for imaging the subject S of inspection, and an image processing means 6 for detecting defects with small differences in density from the ambient area of the subject of inspection by processing image data including information about the density value of each pixel of the subject imaged by the imaging means. The image processing means includes a density information limiting means 16 for limiting, based on predetermined requirements, the density value of each pixel included in the image data, a filter operation processing means 20 for subjecting the image data limited by the density information limiting means to integrating filter processing in a predetermined block unit, and a defect identifying means for identifying defects in the subject by comparing the image data processed by the filter processing means to the image data of a normal portion of the subject. |
