| 摘要 |
PROBLEM TO BE SOLVED: To provide a work touch detection circuit for quickly detecting the work touch of a flip-chip bonder. SOLUTION: Rectangular waves for which sine wave signals from an encoder 4 are waveform-shaped in a zero-cross detector 12 are used as the enable gate of the counting operation of a counter 13. Separately, clock pulses inputted from a clock pulse generator 14 to the counter 13 are counted only for the width time of the gate, and sent to a comparator 15 as a numerical value proportional to the width of the rectangular wave. When the numerical value reaches a predetermined work touch reference value, work touch signals are outputted. Thus, each rectangular wave is compared with the reference value, and shortening is performed compared to the time of being over a plurality of the rectangular waves so as to obtain frequency information as before. |
