摘要 |
PROBLEM TO BE SOLVED: To secure the supply effect of a hydrogen atom that is combined with dangling bond for causing a surface level, removes the surface level, and reduces the dark current, and at the same time to improve sensitivity to blue light or light in near-ultraviolet-ray region, in a solid-state image pickup element that has at least an image pickup region comprising a plurality of light receiving elements (photodiodes) and a means for transferring signal charge detected from each light receiving element as is or for converting the signal charge to voltage for taking out on a semiconductor substrate, and a passivation film having hydrogen supply properties as one of a plurality of layers for covering at least the image pickup region. SOLUTION: In passivation films 11 and 32 made of SiN, light passage holes 11a and 32a are formed corresponding to each of light receiving elements (photodiodes) 3 and 22. In this case, light from an object side toward the light receiving elements 3 and 22 passes through the light passage holes 11a and 32a.
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