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发明名称
GAS DISTRIBUTION APPARATUS FOR SEMICONDUCTOR PROCESSING
摘要
申请公布号
IL147033(D0)
申请公布日期
2002.08.14
申请号
IL20000147033
申请日期
2000.06.12
申请人
LAM RESEARCH CORPORATION
发明人
分类号
H05H1/46;C23C16/44;C23C16/455;H01J37/32;H01L21/302;(IPC1-7):C23C
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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