Optical element for use in exposure apparatus and method for rinsing said optical element

摘要

Disclosed is an optical element (L) disposed in a container (700) having an inside ambience independent from an outside of the container, and rinsed by irradiation with ultraviolet rays from a light source (610) outside the container. Also disclosed is a rinsing method, having a first step for accommodating an article (L), to be rinsed, into a second container (700) disposed inside a first container (600) and being adapted to maintain an ambience different from that of the first container (600), a second step for introducing a rinsing gas into the second container (700), and a third step for irradiating the article (L) with ultraviolet rays from a light source (610) disposed inside the first container (600) but outside the second container (700). <IMAGE>