发明名称 PROBE DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent a contact pin and a spring layer from curving even by changes of abrupt overdriving. SOLUTION: The contact probe 1 has the spring layer 7 adhered to the reverse surface of its film 4. An elastic body 22 is adhered and provided on the rigid body part 21 side in the gap (t) between the rigid body 21, which is formed atop of a mounting base 23 while projecting, and the tip part of the spring layer 7. A gap (x) is formed between the elastic body 22 and the tip part of the spring layer 7. The contact pin 2a is adhered to the top surface of the film 4 without projecting from the tip part of the film 4.
申请公布号 JP2002228685(A) 申请公布日期 2002.08.14
申请号 JP20010022045 申请日期 2001.01.30
申请人 MITSUBISHI MATERIALS CORP 发明人 ISHII TOSHINORI;FUJIMORI SHUJI;KAWAKAMI YOSHIAKI;SASAKI ISATO;IWAKOSHI TAKAO;KATO NAOKI
分类号 G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 G01R31/26
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