| 摘要 |
PROBLEM TO BE SOLVED: To provide a driving device for a deformable mirror which can maintain the optical performance as a deformable mirror highly precisely and can be applied to an inexpensive optical device without being affected by the precision and assembling precision of parts constituting the deformable mirror and photographing conditions. SOLUTION: The driving device is composed of a deformable mirror having a reflection surface which deforms by electrostatic attraction and having electrodes which control the form of the reflection face, a driving means which drives the deformable mirror, a memory means 14 in which the data relating to the displacement of the reflection surface is preliminarily stored, and a correction means (d110, d111,...d11n, etc.), which corrects the driving conditions of the driving means based on the data stored in the memory means. |
