STATE MONITOR FOR PFC HARM ELIMINATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a state monitor for a PFC harm elimination device capable of correctly monitoring a state of the harm elimination device by being mounted on the harm elimination device of PFC being developed day by day. SOLUTION: This monitor has: a gas analysis meter 5 using a FTIR switchably communicating with and connected to the inlet side or the outlet side of the harm elimination device 3 for eliminating a harmful substance contained in an exhaust gas from a process 2 for quantitatively analyzing the concentration of the PFC based on the absorption spectrum of an infrared ray by the exhaust gas flowing through the inlet side or the outlet side of the device 3, and an arithmetic processing part 8 for finding the efficiency of the device 3 by means of the comparison of the concentration of the PFC in the inlet side to that in the outlet side to monitor the state of the device 3.