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发明名称
Verfahren und Vorrichtung zur Verbesserung der Seitenwandbedeckung während des Sputterns in einer Kammer mit induktiv gekoppeltem Plasma
摘要
申请公布号
DE69802313(T2)
申请公布日期
2002.08.14
申请号
DE19986002313T
申请日期
1998.01.23
申请人
APPLIED MATERIALS, INC.
发明人
XU, ZHENG;YAO, GONGDA
分类号
C23C14/34;C23C14/04;C23C14/16;C23C14/35;H01J37/32;H01J37/34;H01L21/203;H01L21/285;H01L21/768;(IPC1-7):C23C14/22;C23C16/44
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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