发明名称 |
Adapter device for carrier pods containing at least one flat object in an ultraclean atmosphere |
摘要 |
An adapter device is placed on a movable plate of a base of an interface device to position a carrier pod at a preset height enabling a standard interfacing system with equipment machines to be used. A side wall of the adapter device comprises a guiding aperture enabling the carrier pod to pass to bring the first door and its lock into alignment with a front support plane of the side wall. A controller is provided to couple the first door with a second door and to unlock the first door when the side wall accosts against a front face of the interface device.
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申请公布号 |
US6431806(B1) |
申请公布日期 |
2002.08.13 |
申请号 |
US19990320844 |
申请日期 |
1999.05.26 |
申请人 |
INCAM SOLUTIONS |
发明人 |
DOCHE CLAUDE |
分类号 |
B65G49/07;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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