发明名称 Clean box, clean transfer method and apparatus therefor
摘要 A clean box has a box body having an aperture in one side surface, an opening/closing lid for hermetically closing the aperture while undergoing vacuum suction to the box body, and a plurality of latches provided on the box body so as to be able to engage the opening/closing lid outside the box body. The latches of the clean box can be unlatched by latch releasing mechanisms from outer and lateral sides of the box body, which are side positions with respect to the side surface having the aperture.
申请公布号 US6430802(B1) 申请公布日期 2002.08.13
申请号 US19990294008 申请日期 1999.04.19
申请人 TDK CORPORATION 发明人 MIYAJIMA TOSHIHIKO
分类号 B65G49/07;B65D85/86;H01L21/673;H01L21/677;(IPC1-7):B23Q3/00;B23P21/00;B65D85/00 主分类号 B65G49/07
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