| 发明名称 |
Rapid thermal heating apparatus and method including an infrared camera to measure substrate temperature |
| 摘要 |
A rapid thermal heating apparatus including a plurality of radiant energy sources and reflectors associated with the radiant energy sources. The radiant energy sources and reflectors direct radiation through a window of an envacuable chamber to radiate regions of a substrate in the chamber with a pattern of radiation intensity.
|
| 申请公布号 |
US6434327(B1) |
申请公布日期 |
2002.08.13 |
| 申请号 |
US19950508638 |
申请日期 |
1995.07.28 |
| 申请人 |
APPLIED MATERIALS, INC.;3-SQUARED SEMICONDUCTOR CORP. |
发明人 |
GRONET CHRISTIAN M.;GIBBONS JAMES F. |
| 分类号 |
C23C16/48;C30B25/10;C30B31/12;C30B31/18;F27B17/00;F27D99/00;G01J5/00;G01J5/06;H01L21/00;H02G3/04;(IPC1-7):A21B2/00 |
主分类号 |
C23C16/48 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
