发明名称 INERTIAL TEMPERATURE CONTROL SYSTEM AND METHOD THEREOF
摘要 PURPOSE: An inertial temperature control system and a method thereof are provided, which controls a temperature using a temperature control algorithm and an inertia temperature control. CONSTITUTION: An inertial temperature control system and method are provided for changing the temperature of a body between two temperatures such that the ending temperature is reached smoothly without substantial temperature overshoot or oscillation. A temperature control algorithm is fed a set point temperature that accelerates and decelerates at a physically attainable rate.
申请公布号 KR20020065398(A) 申请公布日期 2002.08.13
申请号 KR20020006778 申请日期 2002.02.06
申请人 ASML US, INC. 发明人 STARNER ALAN L.
分类号 G05B11/42;G05D23/19;H01L21/00;H05B1/02;(IPC1-7):G05B11/42 主分类号 G05B11/42
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